I tenei wa, ko nga tikanga whakarite opaninga SiCKo te tikanga ko te tikanga gel-sol, te tikanga whakauru, te tikanga paninga paraihe, te tikanga rehu plasma, te tikanga tauhohenga kohu matū (CVR) me te tikanga whakaheke matū (CVD).
Tikanga whakauru
Ko tenei tikanga ko te ahua o te whakamaarama teitei o te waahi totoka, ko te nuinga o te whakamahi i te paura Si me te paura C hei whakauru i te paura, ka tuu tegraphite matrixi roto i te paura whakauru, me nga kaitao i te pāmahana teitei i roto i te hau koretake, ka mutu ka whiwhipaninga SiCi runga i te mata o te matrix graphite. He ngawari te mahi o tenei tikanga, a he pai te here o te paninga me te matrix, engari he kino te whakakotahitanga o te paninga i te ahunga matotoru, a he ngawari ki te whakaputa ake i nga rua, ka hua mai he ngoikoretanga o te waikura.
Tikanga paninga paraihe
Ko te tikanga paninga paraihe te nuinga o te parai i te wai mata ki runga i te mata o te graphite matrix, katahi ka whakakorikori i te rauemi mata ki tetahi pāmahana hei whakarite i te paninga. He ngawari tenei tikanga i roto i te tukanga me te iti o te utu, engari ko te paninga kua oti te whakarite e te tikanga paninga paraihe he hononga ngoikore ki te matrix, he pai te whakakotahitanga o te paninga, te paninga angiangi me te iti o te aukati o te waikura, me etahi atu tikanga hei awhina.
Tikanga rehu plasma
Ko te tikanga mapu plasma te nuinga o te whakamahi i te pu plasma ki te rehu i nga rawa rewa, ahua-whakarewa ranei ki runga i te mata o te tïpako kauwhata, katahi ka whakakaha me te here kia hanga he paninga. He ngawari tenei tikanga ki te whakahaere, a ka taea e koe te whakarite i te ahua matopaninga carbide silicon, engari ko tepaninga carbide siliconka rite ki tenei tikanga he ngoikore rawa te kaha o te aukati i te waikura, no reira ka whakamahia hei whakarite i nga paninga hiato SiC hei whakapai ake i te kounga o te paninga.
Tikanga gel-sol
Ko te tikanga gel-sol te nuinga o te whakarite i tetahi otinga sol me te maramara hei uhi i te mata o te tïpako, ka whakamaroke ki roto i te reera, katahi ka whakahiato kia whiwhi paninga. He ngawari tenei tikanga ki te whakahaere, he iti te utu, engari ko te paninga kua oti te whakarite he ngoikoretanga penei i te iti o te awangawanga waiariki me te pakaru ngawari, kaore e taea te whakamahi whanui.
Tikanga tauhohenga kohu matū (CVR)
Ko te nuinga o te CVR te hanga kohu SiO ma te whakamahi i te paura Si me te SiO2 i te pāmahana teitei, ka puta he raupapa o nga tauhohenga matū ki te mata o te taputapu rauemi C hei whakaputa i te paninga SiC. Ko te paninga SiC kua whakaritea e tenei tikanga ka piri ki te tïpako, engari he tiketike te pāmahana o te tauhohenga, he nui hoki te utu.
Wā tuku: Hune-24-2024