One Overview
I roto i te tukanga hanga ara iahiko whakauru, ko te photolithography te tukanga matua e whakatau ana i te taumata whakauru o nga iahiko whakauru. Ko te mahi o tenei mahi he tuku pono me te whakawhiti i nga korero whakairoiro ara iahiko mai i te kanohi (e kiia ana ko te kanohi) ki te tïpako rauemi semiconductor.
Ko te kaupapa matua o te tukanga whakaahua whakaahua ko te whakamahi i te tauhohenga whakaahua o te photoresist kua pania ki runga i te mata o te taputapu ki te tuhi i te tauira ara iahiko i runga i te kanohi, na reira ka tutuki te kaupapa o te whakawhiti i te tauira ara iahiko whakauru mai i te hoahoa ki te taputapu.
Ko te tukanga taketake o te whakaahua whakaahua:
Tuatahi, ka whakamahia te photoresist ki runga i te mata o te taputapu ma te whakamahi i te miihini whakakikorua;
Na, ka whakamahia he miihini whakaahua whakaahua hei whakaatu i te taputapu kua whakakikoruatia ki te photoresist, a ka whakamahia te tikanga tauhohenga whakaahua ki te tuhi i nga korero tauira kanohi kanohi e tukuna ana e te miihini whakaahua, te whakaoti i te tuku pono, te whakawhiti me te tukurua o te tauira kanohi ki te taputapu;
Ka mutu, ka whakamahia he kaiwhakawhanake ki te whakawhanake i te tïpako e kitea ana hei tango (kia pupuri ranei) i te photoresist ka puta he tauhohenga whakaahua matū i muri i te whitinga.
Te tukanga whakaahua tuarua
Hei whakawhiti i te tauira ara iahiko i hangaia i runga i te kanohi ki te angiangi silicon, me matua tutuki te whakawhitinga ma roto i te mahi whakakitenga, katahi ka whiwhi te tauira silicon ma te mahi tarai.
I te mea ka whakamahia e te whakamaramatanga o te waahi tukanga whakaahua whakaahua he puna marama kowhai he koretake nga rauemi whakaahua, ka kiia hoki ko te waahi marama kowhai.
I whakamahia tuatahi te Photolithography i roto i te ahumahi tā, a ko te hangarau matua mo te hanga PCB wawe. Mai i te tekau tau atu i 1950, kua huri haere te whakaahua whakaahua hei hangarau auraki mo te whakawhiti tauira i roto i te hanga IC.
Ko nga tohu matua o te mahi lithography ko te whakatau, te tairongo, te tika o te whakakikorua, te reeti hapa, aha atu.
Ko te mea tino nui i roto i te tukanga photolithography ko te photoresist, he mea whakaahua. I te mea ko te tairongo o te photoresist e whakawhirinaki ana ki te roangaru o te puna marama, he rereke nga rauemi photoresist e hiahiatia ana mo nga tukanga whakaahua whakaahua penei i te raina g / i, 248nm KrF, me te 193nm ArF.
Ko te tukanga matua o te tukanga whakaahua whakaahua angamaheni e rima nga kaupae:
-Te whakarite kiriata turanga;
-Hoatuhia te photoresist me te tunu ngohengohe;
-Whakariterite, te whakakitenga me te tunu i muri i te whakakitenga;
-Whakawhanake kiriata pakeke;
-Whakawhanaketanga rapunga.
(1)Te whakarite kiriata turanga: te nuinga o te horoi me te matewai. Na te mea ka ngoikore nga mea poke i te piri i waenga i te photoresist me te angiangi, ka taea e te horoi tino pai te whakapai ake i te piri i waenga i te angiangi me te photoresist.
(2)paninga Photoresist: Ka tutuki tenei ma te huri i te wafer silicon. Ko nga momo photoresist e hiahia ana kia rereke nga tawhā tukanga whakakikorua, tae atu ki te tere hurihuri, te matotoru photoresist, me te pāmahana.
Te tunu ngohengohe: Ka taea e te tunu te whakapai ake i te whakapiringa i waenga i te photoresist me te angiangi silicon, me te riterite o te matotoru photoresist, he pai mo te whakahaere tika o nga ine ahuahanga o te tukanga whakairo o muri mai.
(3)Whakariterite me te whakakitenga: Ko te tirohanga me te whakakitenga ko nga mahi tino nui i roto i te tukanga whakaahua whakaahua. E tohu ana ratou ki te whakahāngai i te tauira kanohi ki te tauira o naianei i runga i te angiangi (te tauira paparanga o mua ranei), katahi ka whiti ki te rama motuhake. Ko te kaha marama ka whakahohe i nga waahanga whakaahua i roto i te photoresist, na reira ka whakawhiti i te tauira kanohi ki te photoresist.
Ko nga taputapu e whakamahia ana mo te whakatikatika me te whakakitenga he miihini whakaahua whakaahua, koinei te waahanga utu nui o nga taputapu tukatuka i roto i te katoa o nga mahi whakangao iahiko whakauru. Ko te taumata hangarau o te miihini whakaahua whakaahua e tohu ana i te taumata o te ahunga whakamua o te raina whakaputa katoa.
Te tunu i muri i te mararatanga: e pa ana ki te tukanga tunu poto i muri i te puaretanga, he rereke te awenga atu i nga whakamaarama whakaahua ultraviolet hohonu me nga whakamaarama whakaahua-i-raina.
Mo te photoresist ultraviolet hohonu, ka whakakorehia e te tunu i muri i te panui nga waahanga tiaki i roto i te photoresist, ka tuku i te photoresist ki te memeha i roto i te kaiwhakawhanake, na reira me tika te tunu i muri i te whakamaanga;
Mo nga kaiwhakaahua-i-raina tikanga, ka taea e te tunu i muri i te marara te whakapai ake i te piri o te photoresist me te whakaiti i nga ngaru tu (ka pa kino nga ngaru tu ki te ahua o te taha o te photoresist).
(4)Te whakawhanake i te kiriata pakeke: te whakamahi i te kaiwhakawhanake ki te whakakore i te waahanga whakarewa o te photoresist (whakaahua whakaahua pai) i muri i te putanga, me te whakaatu tika i te tauira kanohi me te tauira photoresist.
Ko nga tawhā matua o te tukanga whanaketanga ko te pāmahana whanaketanga me te wa, te inenga kaiwhakawhanake me te kukū, te horoi, me etahi atu. te whiwhi i te painga whanaketanga e hiahiatia ana.
Kei te mohiotia ano ko te whakamaroke ko te tunu tunu, ko te tikanga o te tango i te toenga whakarewa, kaiwhakawhanake, wai me etahi atu waahanga toenga kore i roto i te photoresist i whakawhanakehia ma te whakamahana me te whakaeto, kia pai ake ai te piri o te photoresist ki te taputapu silicon me te ātete etching o te photoresist.
Ko te pāmahana o te tukanga whakapakeke ka rereke i runga i nga momo photoresists me nga tikanga whakapakeke. Ko te kaupapa ko te tauira photoresist e kore e rerekee, a me tino pakeke te photoresist.
(5)Te tirotiro whanaketanga: Ko tenei hei tirotiro mo nga hapa o te tauira photoresist i muri i te whanaketanga. I te nuinga o te wa, ka whakamahia te hangarau tohu whakaahua ki te karapa aunoa i te tauira maramara i muri i te whanaketanga me te whakataurite ki te tauira paerewa kore-koha i rongoa i mua. Mena ka kitea he rereketanga, ka kiia he hapa.
Mena ka nui ake te maha o nga hapa i tetahi uara, ka whakatauhia kua rahua te angiangi silicon ki te whakamatautau whanaketanga, ka whakakorehia, ka mahia ano ranei ina tika.
I roto i te tukanga hanga ara iahiko whakauru, ko te nuinga o nga tukanga e kore e taea te huri, a ko te whakaahua whakaahua tetahi o nga mahi iti ka taea te mahi ano.
E toru nga papanga whakaahua me nga rauemi photoresist
3.1 Whakaahua
Ko te whakaahua whakaahua, e mohiotia ana ano he kanohi whakaahua whakaahua, he rangatira i whakamahia i roto i te tukanga whakaahua whakaahua o te hanga angiangi iahiko whakakotahi.
Ko te mahi hanga photomask ko te huri i nga raraunga tahora taketake e hiahiatia ana mo te hanga wafer i hangaia e nga miihini hoahoa awhiowhio whakauru ki te whakatakotoranga raraunga ka taea te mohio e nga kaihanga tauira taiaho me nga taputapu whakamaarama hiko hiko na roto i te tukatuka raraunga kanohi, kia kitea ai e te ko nga taputapu i runga ake nei i runga i te papanga papanga whakaahua kua whakakikoruatia ki te papanga whakaahua; katahi ka tukatukahia ma roto i te raupapa o nga tikanga penei i te whakawhanaketanga me te tarai hei whakatika i te tauira i runga i te rauemi tïpako; I te mutunga, ka tirotirohia, ka whakatikahia, ka horoia, ka whakakikoruatia ki te kiriata hei hanga i te hua kanohi kanohi ka tukuna ki te kaihanga hiko whakauru hei whakamahi.
3.2 Whakaahua
Ko te Photoresist, e mohiotia ana ko te photoresist, he taonga whakaahua. Ko nga waahanga whakaahua kei roto ka pa ki nga huringa matū i raro i te rarata o te marama, na reira ka puta nga huringa o te tere memeha. Ko tana mahi nui ko te whakawhiti i te tauira i runga i te kanohi kanohi ki tetahi taputapu penei i te angiangi.
Te parau tumu mahi o te photoresist: Tuatahi, ka pania te photoresist ki runga i te tïpako me te tunu i mua ki te tango i te whakarewa;
Tuarua, ka noho te kanohi ki te marama, ka puta he tauhohenga matū nga waahanga whakaahua i roto i te waahanga kua kitea;
Na, ka mahia he tunu i muri i te mararatanga;
I te mutunga, ko te photoresist he wahanga i roto i te whanaketanga (mo te photoresist pai, ka rewa te waahi kua kitea; mo te photoresist kino, ka rewa te waahi kaore i kitea), na reira ka mohio ki te whakawhiti i te tauira ara iahiko whakauru mai i te kanohi ki te tïpako.
Ko nga waahanga o te photoresist te nuinga ko te kapia hanga kiriata, te waahanga whakaahua, nga taapiri taapiri me te whakarewa.
I roto ia ratou, ka whakamahia te kapia-kiriata hei whakarato i nga taonga miihini me te aukati etching; ka huri te waahanga whakaahua i nga huringa matū i raro i te marama, ka puta he huringa i te tere memeha;
Ko nga taapiri taapiri ko nga waikano, te whakarei ake i te kirikiri, me etahi atu, ka whakamahia hei whakapai ake i te mahi o te photoresist; ka whakamahia nga whakarewa ki te whakakore i nga waahanga me te whakakotahi kia rite.
Ko nga photoresists e whakamahia ana i tenei wa ka taea te wehewehe ki nga photoresists tuku iho me nga photoresists kua whakakaha matū e ai ki te tikanga tauhohenga whakaahua, a ka taea hoki te wehea ki te ultraviolet, ultraviolet hohonu, ultraviolet tino, kurupae irahiko, kurupae katote me nga photoresists X-ray e ai ki te roangaru photosensitivity.
E wha nga taputapu whakaahua whakaahua
Kua haere te hangarau whakaahua whakaahua i roto i te tukanga whakawhanaketanga o te whakahiato / tata tata, te whakaata whakaata matakite, te hikoi-a-tuku-a-ringa, te matawai-a-ringa, te rumaki pukapuka, me te EUV lithography.
4.1 Mīhini Whakapā / Tata ki te Lithography
I puta mai te hangarau whakangao tuhi i te tekau tau atu i 1960, ka whakamahia nuitia i nga tau 1970. Koia te tikanga lithography matua i te wa o nga waahanga iti-iti, i whakamahia te nuinga ki te whakaputa iahiko whakauru me te rahi o nga waahanga nui atu i te 5μm.
I roto i te mihini litography whakapā/tata, ka tukuna te angiangi ki runga i te tuunga whakapae me te tepu mahi hurihuri. Ka whakamahia e te kaiwhakahaere he microscope parae motuhake hei mataki i te tuunga o te kopare me te angiangi, me te whakahaere a-ringa i te tuunga o te tepu mahi hei whakarite i te kopare me te angiangi. I muri i te whakahoatanga o te angiangi me te kanohi kanohi, ka pehia nga mea e rua kia piri tika ai te kanohi ki te photoresist i runga i te mata o te angiangi.
Whai muri i te tangohanga o te whainga karu, ka nekehia te angiangi me te kanohi kanohi ki te teepu whakamaarama mo te whakaatu. Ko te rama e tukuna ana e te rama mercury ka whakarara, ka whakarara ki te kanohi ma te arotahi. Mai i te mea kei te whakapiri tika te kanohi ki te paparanga photoresist i runga i te angiangi, ka whakawhitia te tauira kanohi ki te paparanga photoresist i te ōwehenga o te 1:1 i muri i te whakaaturanga.
Ko nga taputapu lithography whakapā ko te taputapu lithography whatu ngawari me te ohaoha, a ka taea te whakaatu i nga whakairoiro ahua iti-micron, no reira kei te whakamahia tonu i roto i te hanga hua-iti me te rangahau taiwhanga. I roto i te hanga ara iahiko whakauru nui, i whakauruhia te hangarau litography tata ki te karo i te pikinga o nga utu litography na te whakapiri tika i waenga i te kanohi me te angiangi.
I whakamahia nuitia te tuhi tuhi tata i te tekau tau 1970 i te wa o nga iahiko whakauru-iti me te wa o mua o nga iahiko whakauru tauine waenga. Kaore i te rite ki te whakamaaramatanga whakapiri, karekau te kanohi i roto i te papaatanga tata i te whakapiri tika ki te kaitahuri whakaahua i runga i te angiangi, engari ka waiho he waahi kua whakakiia ki te hauota. Ka rewa te kopare i runga i te hauota, ka whakatauhia te rahi o te aputa i waenga i te kopare me te angiangi ma te pehanga hauota.
I te mea karekau he hononga tika i waenga i te angiangi me te kanohi i roto i te lithography tata, ka heke nga hapa i puta i te wa o te mahi lithography, na reira ka whakaiti i te ngaro o te kanohi me te whakapai ake i te hua angiangi. I roto i te lithography tata, te aputa i waenganui i te angiangi me te kanohi ka waiho te angiangi ki te rohe wehewehe Fresnel. Ko te ahua o te rereketanga ka whakaiti i te whakapai ake i te whakatau o nga taputapu lithography tata, na tenei hangarau e pai ana mo te hanga iahiko whakauru me nga rahi o runga ake i te 3μm.
4.2 Te Kaihoko me te Kaihuri
Ko te stepper tetahi o nga taputapu tino nui i roto i te hitori o te wafer lithography, i whakatairanga i te tukanga lithography iti-micron ki te hanga papatipu. Ka whakamahia e te stepper tetahi mara whakakitenga angamaheni o te 22mm × 22mm me te arotahi matapae mata me te ōwehenga whakaheke o 5:1 ranei 4:1 ki te whakawhiti i te tauira i runga i te kanohi ki te angiangi.
Ko te tikanga o te miihini tuhi hikoi me te tukurua he puunaha whakamaarama, he puunaha iti o te waahanga mahi, he puunaha iti o te atamira kanohi, he punaha arotahi/whakataumata, he puunaha tirohanga, he punaha anga matua, he punaha whakawhiti angiangi, he punaha whakawhiti kanohi. , he punaha hiko, he punaha rorohiko.
Ko te mahi angamaheni o te miihini lithography taahiraa-a-tuku e whai ake nei:
Tuatahi, ka whakawhitihia te angiangi kua whakakikoruatia ki te photoresist ki te teepu mahi ma te whakamahi i te punaha whakawhiti angiangi, a, ka whakawhitia te kopare ki te tepu kanohi ma te whakamahi i te punaha whakawhiti kanohi;
Na, ka whakamahia e te punaha te punaha arotahi/whakataumata hei mahi inenga teitei-maha i runga i te angiangi i runga i te waahi mahi kia whiwhi korero penei i te teitei me te koki hongo o te mata o te angiangi ka kitea, kia puta ai te waahi o ka taea te whakahaere i te wafer i nga wa katoa i roto i te hohonutanga o te kaupapa matapae i te wa e mahi ana;I muri mai, ka whakamahia e te punaha te punaha whakararo ki te whakarite i te kanohi kanohi me te angiangi kia i te wa o te mahi whakakitenga ko te tika o te tuunga o te ahua kanohi kanohi me te whakawhiti tauira angiangi kei roto tonu i nga whakaritenga whakakikorua.
Ka mutu, ka oti te mahi taahiraa-a-whakakitenga o te mata angiangi katoa kia rite ki te huarahi kua whakaritea kia mohio ai ki te mahi whakawhiti tauira.
Ko te miihini hiko hikoi me te miihini lithography o muri mai kei runga i te tikanga mahi taketake o runga ake nei, te whakapai ake i te hikoi → te whakakitenga ki te matawai → te whakakitenga, me te arotahi/whakataumata → te tirohanga → te whakakitenga i runga i te tauira rua-waahanga ki te ine (arotahi/whakatairitenga → tirohanga) me te matawai. whakarara.
Ka whakatauritea ki te miihini hiko hikoi-a-matawai, karekau e tika kia tutuki i te miihini whakamuri whakamuri o te kopare me te angiangi, kaore hoki e hiahiatia he ripanga kanohi matawai me te punaha whakahaere matawai tukutahi. Na reira, he ngawari te hanganga, he iti te utu, he pono te mahi.
I muri i te urunga o te hangarau IC ki te 0.25μm, ka timata te paheketanga o te tono o te hikoi-a-tuurua na te painga o te hikoi-a-matawai i roto i te matawai i te rahi o te mara whakaaturanga me te riterite o te whakaaturanga. I tenei wa, ko te rekoata hikoi-a-tuurua hou e whakaratohia ana e Nikon he maataki whakakitenga pateko rite te nui o te hikoi-a-matawai, a ka taea e ia te tukatuka neke atu i te 200 nga angiangi ia haora, me te tino pai o te whakaputa. Ko tenei momo miihini lithography kei te whakamahia i tenei wa mo te hanga i nga paparanga IC kore-arohaehae.
4.3 Matawai Stepper
I te tekau tau atu i 1990 ka timata te whakamahi o te hikoi me te matawai. Ma te whirihora i nga puna marama whakamaarama rereke, ka taea e te hangarau taahiraa-a-matawai te tautoko i nga momo hangarau tukanga rereke, mai i te 365nm, 248nm, 193nm rumaki ki te EUV lithography. Kaore i rite ki te hikoi hikoi me te tukurua, ko te whakaaturanga-a-papa kotahi o te hikoi-a-matawai-a-ringa ka tango i te matawai hihiko, ara, ko te pereti kanohi ka whakaoti i te nekehanga matawai i te wa kotahi ki te angiangi; i muri i te otinga o te whakaaturanga mara o naianei, ka mauhia te angiangi e te waahi mahi, ka eke ki te tuunga mara matawai e whai ake nei, ka mau tonu te tukunga; tukuruatia te whakaaturanga taahiraa-a-matawai kia maha nga wa ka kitea nga mara katoa o te angiangi katoa.
Ma te whirihora i nga momo puna marama rereke (penei i te raina-i, KrF, ArF), ka taea e te kaitapa-taahiraa te tautoko tata ki nga waahanga hangarau katoa o te tukanga-mutunga-mua. Ko nga tikanga CMOS e pa ana ki te silicon-a-ahua kua tango i nga hikoi-matawai i roto i nga rahinga nui mai i te 0.18μm node; ka whakamahia ano hoki e nga miihini hiko o te ultraviolet (EUV) i tenei wa i roto i nga waahanga mahi i raro i te 7nm te matawai hikoi. I muri i te whakarereketanga o te waahanga, ka taea hoki e te stepper-scanner te tautoko i te rangahau me te whakawhanaketanga me te hanga i te maha o nga tikanga kore-siliconi penei i te MEMS, nga taputapu hiko, me nga taputapu RF.
Ko nga kaihanga matua o nga miihini whakaata hiko-a-matawai ko te ASML (Netherlands), Nikon (Japan), Canon (Japan) me SMEE (Haina). I whakarewahia e te ASML te raupapa TWINSCAN o nga miihini hiko-a-scan lithography i te tau 2001. Ka tangohia e ia he hoahoanga punaha-rua-waahanga, ka taea te whakapai ake i te tere o te whakaputanga o nga taputapu me te mea kua tino whakamahia te miihini lithography teitei.
4.4 Rumaki Lithography
Ka kitea mai i te tauira Rayleigh, ka noho tonu te roangaru o te ngaru, he huarahi whai hua ki te whakapai ake i te whakataunga atahanga ko te whakanui ake i te kohao tatau o te punaha whakaahua. Mo nga whakataunga atahanga i raro iho i te 45nm me te teitei ake, kaore e taea e te tikanga whakamaroke whakamaroke ArF te whakatutuki i nga whakaritenga (na te mea e tautoko ana i te taumira atahanga teitei o te 65nm), na reira me whakauru he tikanga whakamaoritanga rumaki. I roto i te hangarau tuhi tuku iho, ko te reo i waenganui i te arotahi me te photoresist he hau, i te mea ka whakakapihia e te hangarau litography rumaki te reo hau ki te wai (te nuinga o te wai ultrapure me te taupū whakaata o te 1.44).
Ko te tikanga, ka whakamahia e te hangarau litography rumaki te whakapoto i te roangaru o te puna marama i muri i te whitinga o te marama i roto i te reo wai hei whakapai ake i te taumira, a, ko te owehenga whakapoto ko te taupū whakaata o te reo wai. Ahakoa ko te miihini rita o te rumaki he momo miihini hiko-a-karapa, a kaore ano kia rereke te otinga o te punaha taputapu, he whakarereke me te roha o te miihini ArF taahiraa-a-scan lithography na te whakaurunga o nga hangarau matua e pa ana. ki te rumaki.
Ko te painga o te litography rumaki ko te mea, na te pikinga o te kohao tau o te punaha, kua pai ake te kaha o te whakatau whakaahua o te miihini hiko-a-te-taahiraa, ka taea te whakatutuki i nga whakaritenga o te tukanga o te whakatau whakaahua i raro iho i te 45nm.
Mai i te mea kei te whakamahi tonu te miihini litography rumaki i te puna marama ArF, ka whakamanahia te haere tonu o te mahi, ka tiakina te utu R&D mo te puna marama, taputapu me te tukanga. I runga i tenei kaupapa, ka honoa me te maha o nga whakairoiro me te hangarau tuhi rorohiko, ka taea te whakamahi i te miihini ritatuhi rumaki ki nga pona tukanga o te 22nm me raro. I mua i te whakaurunga mana o te mihini litography EUV ki te hanga papatipu, kua whakamahia nuitia te mihini litography rumaki a ka taea e ia te whakatutuki i nga whakaritenga tukanga o te node 7nm. Heoi, na te whakaurunga o te wai rumaki, kua tino piki ake te uaua o te miihini o te taputapu ake.
Ko ona hangarau matua ko te tuku wai rumaki me te hangarau whakaora, te hangarau tiaki mara wai rumaki, te parahanga litography rumaki me te hangarau whakahaere hapa, te whakawhanaketanga me te tiaki i nga arotahi matapae ruku aperture tino nui, me te hangarau rapunga kounga atahanga i raro i nga tikanga rumaki.
I tenei wa, ko nga miihini ArFi takahanga-a-scan lithography te nuinga e whakaratohia ana e nga kamupene e rua, ara ko ASML o Netherlands me Nikon o Japan. I roto ia ratou, ko te utu o te ASML NXT1980 Di kotahi e tata ana ki te 80 miriona euros.
4.4 Miihini Lithography Ultraviolet Tino
Hei whakapai ake i te whakataunga o te whakaahua whakaahua, ka whakapotohia te roangaru o te ngaru i muri i te tangohanga o te puna marama excimer, me te rama ultraviolet tino nui me te roangaru o te 10 ki te 14 nm ka whakauruhia hei puna marama. He poto rawa te roangaru o te rama ultraviolet tino, a ko te punaha whakaata whakaata e taea ana te whakamahi ko te nuinga o nga wa ka hangaia he whakaatakiriata multilayer penei i a Mo/Si, Mo/Be ranei.
I roto ia ratou, ko te whakaata morahi o te kiriata Mo / Si multilayer i roto i te roangaru o te 13.0 ki te 13.5nm e pa ana ki te 70%, me te whakaaro nui o te whakaata o Mo / Be multilayer kiriata i te roangaru poto o te 11.1nm he 80%. Ahakoa he teitei ake te whakaata o Mo/Be multilayer whakaatakiriata whakaata, he tino paitini a Be, na reira i whakarerea te rangahau mo aua rawa i te wa e whakawhanake ana i te hangarau hangarau tuhi EUV.Ko te hangarau o te EUV lithography o naianei e whakamahi ana i te kiriata multilayer Mo/Si, a ko te roangaru whakakitenga kua whakatauhia ano kia 13.5nm.
Ko te puna marama ultraviolet tino nui e whakamahi ana i te hangarau plasma i hangaia e te taiaho (LPP), e whakamahi ana i nga laser kaha-nui ki te whakaohooho i te wera-rewa Sn plasma ki te whakaputa marama. Mo te wa roa, ko te mana me te waatea o te puna marama ko nga pounamu e aukati ana i te kaha o nga miihini tuhi EUV. Na roto i te kaha oscillator power amplifier, te hangarau plasma matapae (PP) me te hangarau horoi whakaata i roto i te waahi, kua tino pai ake te mana me te pumau o nga puna marama EUV.
Ko te miihini Lithography EUV te nuinga o nga puunaha iti penei i te puna marama, rama, arotahi whainga, atamira mahi, atamira kanohi, te angiangi angiangi, arotahi/taumata, tuku kanohi, tuku angiangi, me te anga korehau. Whai muri i te whakawhiti i roto i te punaha whakamarama i hangaia e nga whakaata kua whakakikoruatia nga paparanga maha, ka whiti te rama ultraviolet tino ki runga i te kanohi whakaata. Ko te rama e whakaatahia ana e te kanohi ka uru ki roto i te punaha whakaata whakaata katoa i hangaia e te raupapa whakaata, ka mutu ka whakaatuhia te ahua whakaata o te kanohi ki runga i te mata o te angiangi i roto i te taiao korehau.
Ko te waahi o te tirohanga me te waahi atahanga o te miihini litography EUV he rite te ahua o te pewa, a ka whakamahia he tikanga matawai-a-taahiraa ki te whakatutuki i te whakaaturanga angiangi katoa hei whakapai ake i te reiti whakaputa. Ko te raupapa NXE tino matatau o te ASML e whakamahi ana i te puna marama marama me te roangaru o te 13.5nm, he kanohi whakaata (6° oblique incidence), he 4x reduction reflective projection objective system with a 6-mirror structure (NA=0.33), he matawai mara tirohanga o 26mm × 33mm, me te taiao whakakitenga korehau.
Ki te whakatauritea ki nga miihini rita o te rumaki, kua tino pai ake te taumira whakamohiotanga kotahi o nga miihini miihini EUV e whakamahi ana i nga puna maramara ultraviolet tino nui, ka taea te karo i te tukanga uaua e hiahiatia ana mo te whakaahua whakaahua maha hei hanga whakairoiro taumira teitei. I tenei wa, ko te taumira whakaatu kotahi o te miihini NXE 3400B lithography me te aperture tau o 0.33 ka tae ki te 13nm, a ko te reiti whakaputa ka tae ki te 125 nga waahanga / h.
Hei whakatutuki i nga hiahia mo te toronga atu o te Ture a Moore, a meake nei, ko nga mihini litography EUV me te kohao tatau o te 0.5 ka tango i tetahi punaha whaainga matapae me te aukati rama i waenganui, ma te whakamahi i te whakanui hangarite o te 0.25 wa/0.125 wa, me te ka whakahekehia te mara whakakitenga matawai mai i te 26m × 33mm ki te 26mm × 16.5mm, me te whakaaturanga kotahi ka taea e taumira tae i raro 8nm.
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Ka taea e Semicera te whakaratonga waahanga kauwhata, ngawari/mārō te rongo, nga waahanga carbide silicon, Ko nga waahanga carbide silicon CVD, aSiC/TaC nga waahanga kua paniame te tukanga semiconductor katoa i roto i nga ra 30.
Mena kei te pirangi koe ki nga hua semiconductor o runga ake nei,kaua koe e mangere ki te whakapiri mai ki a maatau i te wa tuatahi.
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Te wa tuku: Akuhata-31-2024