Ko te tukanga hanga angiangi Silicon carbide

Silicon wafer

Te angiangi waro Siliconhe mea hanga mai i te paura silicon parakore me te paura waro parakore teitei hei rauemi mata, ka whakatipuhia te karaihe carbide silicon e te tikanga whakawhiti kohu tinana (PVT), ka tukatukahia ki roto.te angiangi waro hiraka.

① Te whakahiato rauemi mata.Ko te paura silicon parakore me te paura waro parakore teitei i konatunatua kia rite ki tetahi owehenga, ka whakahiatohia nga matūriki carbide silicon ki te teitei o te pāmahana i runga ake i te 2,000 ℃.I muri i te kuru, te horoi me etahi atu tukanga, ka rite nga rauemi mata o te silicon carbide paura e tutuki ana i nga whakaritenga o te tipu karaihe.

② Te tipu tioata.Ma te whakamahi i te paura SIC parakore nui hei rauemi mata, i whakatipuhia te karaihe ma te tikanga whakawhiti kohu tinana (PVT) ma te whakamahi i te oumu tipu karaihe i hangaia e ia ano.

③ tukatuka ingot.Ko te ingot karaihe carbide silicon carbide i whakawhiwhia e te X-ray kotahi karaihe orientator, katahi ka hurihia ka hurihia, ka tukatukahia ki te karaihe carbide silicon diameter paerewa.

④ Te tapahi karaihe.Ma te whakamahi i nga taputapu tapahi raina-maha, ka tapahia nga tioata carbide silicon ki nga pepa angiangi me te matotoru kaua e neke atu i te 1mm.

⑤ Te huri maramara.Ka kuia te angiangi ki te papatahi me te taratara e hiahiatia ana e te taimana huri wai o nga rahi matūriki rereke.

⑥ Te oro maramara.Ko te carbide silicon kua orohia kaore he kino o te mata i whiwhihia e te miihini miihini me te miihini miihini matū.

⑦ Tirohanga maramara.Whakamahia te karuiti mata, X-ray diffractometer, atomic force microscope, non-contact resistivity tester, mata papatahi tester, mata koha matawhānui tester me etahi atu taputapu me nga taputapu ki te kite i te kiato microtubule, kounga karaihe, taratara mata, parenga, warpage, curvature, huringa matotoru, rakuraku mata me etahi atu tawhā o te angiangi carbide silicon.E ai ki tenei, ka whakatauhia te taumata kounga o te maramara.

⑧ Te horoi maramara.Ka horoia te pepa whakakorikori silicon carbide ki te kaihoko horoi me te wai parakore ki te tango i te toenga o te wai whakakoi me etahi atu paru mata i runga i te pepa whakakoi, katahi ka pupuhihia te angiangi me te wiri maroke e te hauota ultra-tiketike me te miihini whakamaroke;Ko te angiangi kua whakakopahia ki roto i te pouaka pepa ma i roto i te ruuma tino-ma hei hanga i te angiangi carbide silicon carbide ki raro.

Ko te nui ake o te rahi o te maramara, ko te uaua ake o te tipu o te karaihe me te hangarau tukatuka, me te teitei ake o te mahi hanga o nga taputapu o raro, ka iti ake te utu o te waahanga.


Te wa tuku: Noema-24-2023