Ko Semicera10x10mm Nonpolar M-rererangi Aluminum Substratehe mea tino hangaia kia tutuki nga whakaritenga o nga tono optoelectronic matatau. Ko tenei tïpako he kaupapa M-rererangi kore-polar, he mea tino nui mo te whakaheke i nga paanga polarization i roto i nga taputapu penei i nga LED me nga diodes laser, ka piki ake te mahi me te pai.
Ko te10x10mm Nonpolar M-rererangi Aluminum Substratehe mea hanga ki te kounga tioata tino pai, e whakarite ana i te iti o te kiato koha me te tino tika o te hanganga. Ma tenei ka pai te whiriwhiri mo te tipu epitaxial o nga kiriata III-nitride-kounga teitei, he mea nui mo te whakawhanaketanga o nga taputapu optoelectronic whakatipuranga.
Ko te hangahanga tika a Semicera e whakarite ana i ia10x10mm Nonpolar M-rererangi Aluminum Substratehe rite tonu te matotoru me te papatahi o te mata, he mea tino nui mo te whakatakoto kiriata me te hanga taputapu. I tua atu, ko te rahi o te taputapu e tika ana mo nga rangahau me nga taiao whakaputa, ka taea te whakamahi ngawari i roto i nga momo tono. Na te tino pai o te waiariki me te matū, ka whakaratohia e tenei taputapu he turanga pono mo te whakawhanaketanga o nga hangarau optoelectronic.
| Nga taonga | Whakaputa | Rangahau | Porekau |
| Tawhā Kiriata | |||
| Polytype | 4H | ||
| Hapa takotoranga mata | <11-20 >4±0.15° | ||
| Tawhā Hiko | |||
| Dopant | n-momo Nitrogen | ||
| Te ātete | 0.015-0.025ohm·cm | ||
| Tawhā Hangarau | |||
| Diamita | 150.0±0.2mm | ||
| Mātotoru | 350±25 μm | ||
| Te takotoranga papa tuatahi | [1-100]±5° | ||
| Te roa papatahi tuatahi | 47.5±1.5mm | ||
| Papatahi tuarua | Karekau | ||
| TTV | ≤5 μm | ≤10 μm | ≤15 μm |
| LTV | ≤3 μm(5mm*5mm) | ≤5 μm(5mm*5mm) | ≤10 μm(5mm*5mm) |
| Kopere | -15μm ~ 15μm | -35μm ~ 35μm | -45μm ~ 45μm |
| Warp | ≤35 μm | ≤45 μm | ≤55 μm |
| Mua (Si-mata) taratara (AFM) | Ra≤0.2nm (5μm*5μm) | ||
| Hanganga | |||
| Kiato paipa moroiti | <1 ea/cm2 | <10 ea/cm2 | <15 ea/cm2 |
| Nga poke whakarewa | ≤5E10atoms/cm2 | NA | |
| BPD | ≤1500 ea/cm2 | ≤3000 ea/cm2 | NA |
| TSD | ≤500 ea/cm2 | ≤1000 ea/cm2 | NA |
| Kounga o mua | |||
| Mua | Si | ||
| Whakamutu mata | Si-mata CMP | ||
| Matūriki | ≤60ea/wafer (rahi≥0.3μm) | NA | |
| Nga karawarawa | ≤5ea/mm. Roa whakaemi ≤Diameter | Roa whakahiato≤2*Diameter | NA |
| Te kiri karaka/rua/wauwau/wauwau/kapiti/parahanga | Karekau | NA | |
| Nga kongakonga taha/nuo/whawhati/papa hex | Karekau | ||
| Nga waahi polytype | Karekau | Horahanga whakahiato≤20% | Horahanga whakahiato≤30% |
| Tohu taiaho o mua | Karekau | ||
| Kounga Whakamuri | |||
| Mutunga tuara | C-kanohi CMP | ||
| Nga karawarawa | ≤5ea/mm, Roa whakahiato≤2* Diameter | NA | |
| He koha ki muri (nga maramara tapa) | Karekau | ||
| Te taratara o muri | Ra≤0.2nm (5μm*5μm) | ||
| Te tohu taiaho tuara | 1 mm (mai i te taha o runga) | ||
| Tapa | |||
| Tapa | Chamfer | ||
| Te takai | |||
| Te takai | Epi-reri me te takai korehau Takai rīpene angiangi maha | ||
| *Tuhipoka: "NA" te tikanga karekau he tono Ko nga taonga kaore i whakahuahia ka pa ki te SEMI-STD. | |||
