Ka whakaratohia e to maatau kamupenepaninga SiCratonga tukatuka i runga i te mata o te kauwhata, te karamu me etahi atu rawa ma te tikanga CVD, kia tauhohe ai nga hau motuhake kei roto i te waro me te silicon i te teitei o te pāmahana ki te whiwhi i nga ngota ngota Sic tino parakore, ka taea te whakatakoto ki runga i te mata o nga mea kua pania hei hanga i tePaparanga tiaki SiCmo te momo oko epitaxy hy pnotic.
Āhuatanga matua:
1 .High pure SiC pani kauwhata
2. He pai ake te parenga wera me te riterite o te waiariki
3. PaiKa pania te karaihe SiCmo te mata maeneene
4. Te mauroa teitei ki te horoi matū
Nga Whakatakotoranga Matua oWhakakikorua CVD-SIC
Nga Taonga SiC-CVD | ||
Hanganga Kiriata | FCC β wāhanga | |
Kiato | g/cm³ | 3.21 |
Te pakeke | Vickers pakeke | 2500 |
Rahi witi | μm | 2~10 |
Te Maamaa | % | 99.99995 |
Raukaha Wera | J·kg-1 ·K-1 | 640 |
Te Mahana Whakararo | ℃ | 2700 |
Te Kaha Felexural | MPa (RT 4-point) | 415 |
Young's Modulus | Gpa (4pt piko, 1300℃) | 430 |
Roha Ngawha (CTE) | 10-6K-1 | 4.5 |
Te kawe werawera | (W/mK) | 300 |