Semicerakei te whakapehapeha ki te whakaatu i te30mm Aluminium Nitride Wafer Substrate, he rauemi teitei i hangaia hei whakatutuki i nga hiahia o nga tono hiko me te optoelectronic hou. Ko nga taputapu Aluminum Nitride (AlN) e rongonui ana mo o raatau kaha ki te kawe i te waiariki me nga taonga whakamaarama hiko, na te mea he pai rawa atu mo nga taputapu mahi teitei.
Āhuatanga matua:
• Ngaaahua Ngaaahu Tino: Te30mm Aluminium Nitride Wafer Substratee whakanui ana i te kawe wera ki runga ki te 170 W/mK, tino teitei ake i etahi atu taputapu tïpako, e whakarite ana i te tohanga wera pai i roto i nga tono mana nui.
•Tiwhikete Hiko Teitei: He pai rawa atu nga ahuatanga whakamaarama hiko, ka whakaitihia e tenei tïpako nga korero whakawhiti me te pokanoa tohu, he pai mo nga tono RF me te ngaruiti.
•Te Kaha Miihini: Te30mm Aluminium Nitride Wafer Substrateka tuku i te kaha me te pumau o te miihini, me te whakarite i te mauroa me te pono ahakoa i raro i nga tikanga whakahaere.
•Nga tono maha: He tino pai tenei tïpako mo te whakamahi i nga rama hiko teitei, laser diodes, me nga waahanga RF, e whakarato ana i te turanga pakari me te pono mo o kaupapa tino hiahia.
•Hanga Tika: Ka whakarite a Semicera ka hangaia ia tïpako angiangi ki te tino tika, e tuku ana i te matotoru riterite me te kounga o te mata kia tutuki ai nga paerewa tika o nga taputapu hiko matatau.
Whakanuia te pai me te pono o o taputapu me Semicera's30mm Aluminium Nitride Wafer Substrate. I hangaia a maatau taputapu ki te whakaputa i nga mahi pai ake, me te whakarite kia pai te whakahaere o o punaha hiko me te optoelectronic. Whakawhirinaki ki a Semicera mo nga rauemi hou e arahi ana i te ahumahi ki te kounga me te auaha.
| Nga taonga | Whakaputa | Rangahau | Porekau |
| Tawhā Kiriata | |||
| Polytype | 4H | ||
| Hapa takotoranga mata | <11-20 >4±0.15° | ||
| Tawhā Hiko | |||
| Dopant | n-momo Nitrogen | ||
| Te ātete | 0.015-0.025ohm·cm | ||
| Tawhā Hangarau | |||
| Diamita | 150.0±0.2mm | ||
| Mātotoru | 350±25 μm | ||
| Te takotoranga papa tuatahi | [1-100]±5° | ||
| Te roa papatahi tuatahi | 47.5±1.5mm | ||
| Papatahi tuarua | Karekau | ||
| TTV | ≤5 μm | ≤10 μm | ≤15 μm |
| LTV | ≤3 μm(5mm*5mm) | ≤5 μm(5mm*5mm) | ≤10 μm(5mm*5mm) |
| Kopere | -15μm ~ 15μm | -35μm ~ 35μm | -45μm ~ 45μm |
| Warp | ≤35 μm | ≤45 μm | ≤55 μm |
| Mua (Si-mata) taratara (AFM) | Ra≤0.2nm (5μm*5μm) | ||
| Hanganga | |||
| Kiato paipa moroiti | <1 ea/cm2 | <10 ea/cm2 | <15 ea/cm2 |
| Nga poke whakarewa | ≤5E10atoms/cm2 | NA | |
| BPD | ≤1500 ea/cm2 | ≤3000 ea/cm2 | NA |
| TSD | ≤500 ea/cm2 | ≤1000 ea/cm2 | NA |
| Kounga o mua | |||
| Mua | Si | ||
| Whakamutu mata | Si-mata CMP | ||
| Matūriki | ≤60ea/wafer (rahi≥0.3μm) | NA | |
| Nga karawarawa | ≤5ea/mm. Roa whakaemi ≤Diameter | Roa whakahiato≤2*Diameter | NA |
| Te kiri karaka/rua/wauwau/wauwau/kapiti/parahanga | Karekau | NA | |
| Nga kongakonga taha/nuo/whawhati/papa hex | Karekau | ||
| Nga waahi polytype | Karekau | Horahanga whakahiato≤20% | Horahanga whakahiato≤30% |
| Tohu taiaho o mua | Karekau | ||
| Kounga Whakamuri | |||
| Mutunga tuara | C-kanohi CMP | ||
| Nga karawarawa | ≤5ea/mm, Roa whakahiato≤2* Diameter | NA | |
| He koha ki muri (nga maramara tapa) | Karekau | ||
| Te taratara o muri | Ra≤0.2nm (5μm*5μm) | ||
| Te tohu taiaho tuara | 1 mm (mai i te taha o runga) | ||
| Tapa | |||
| Tapa | Chamfer | ||
| Te takai | |||
| Te takai | Epi-reri me te takai korehau Takai rīpene angiangi maha | ||
| *Tuhipoka: "NA" te tikanga karekau he tono Ko nga taonga kaore i whakahuahia ka pa ki te SEMI-STD. | |||
