4 Inihi SiC Substrate N-momo

Whakaahuatanga Poto:

Ka tukuna e Semicera te whānuitanga o nga momo angiangi 4H-8H SiC. Mo nga tau maha, he kaihanga me te kaiwhakarato o nga hua ki te ahumahi semiconductor me te photovoltaic. Ko o tatou hua matua ko: Pereti hata silicon carbide, waka waka waka waka, poti angiangi silicon carbide (PV & Semiconductor), ngongo oumu carbide silicon, nga hoe cantilever silicon carbide, chucks silicon carbide, kurupae carbide silicon, me nga paninga CVD SiC me TaC paninga. Ka kapi i te nuinga o nga maakete a te Pakeha me Amerika. Kei te tumanako matou ki te noho hei hoa mo te wa roa i Haina.

Tukuna he imeera ki a matou

Taipitopito Hua

Tohu Hua

Silicon carbide (SiC) rauemi karaihe kotahi he nui te whanui aputa ropu (~ Si 3 wa), te kawe waiariki tiketike (~ Si 3.3 wa GaAs 10 wa ranei), tiketike irahiko waiwai auau hekenga (~ Si 2.5 wa), hiko pakaru tiketike mara (~Si 10 wa ranei GaAs 5 wa) me etahi atu ahuatanga tino pai.

Ka taea e te kaha Semicera te whakarato i nga kaihoko ki te Conductive (Conductive), Semi-insulating (Semi-insulating), HPSI (High Purity semi-insulating) silicon carbide substrate; I tua atu, ka taea e matou te whakarato i nga kaihoko ki nga pepa epitaxial silicon carbide homogeneous me te heterogeneous; Ka taea hoki e matou te whakarite i te pepa epitaxial kia rite ki nga hiahia motuhake o nga kaihoko, a kaore he rahinga ota iti.

Nga taonga	Whakaputa	Rangahau	Porekau
Tawhā Kiriata
Polytype	4H
Hapa takotoranga mata	<11-20 >4±0.15°
Tawhā Hiko
Dopant	n-momo Nitrogen
Te ātete	0.015-0.025ohm·cm
Tawhā Hangarau
Diamita	99.5 - 100mm
Mātotoru	350±25 μm
Te takotoranga papa tuatahi	[1-100]±5°
Te roa papatahi tuatahi	32.5±1.5mm
Turanga papatahi tuarua	90° CW mai i te papa tuatahi ±5°. mata kirika ki runga
Te roa papatahi tuarua	18±1.5mm
TTV	≤5 μm	≤10 μm	≤20 μm
LTV	≤2 μm(5mm*5mm)	≤5 μm(5mm*5mm)	NA
Kopere	-15μm ~ 15μm	-35μm ~ 35μm	-45μm ~ 45μm
Warp	≤20 μm	≤45 μm	≤50 μm
Mua (Si-mata) taratara (AFM)	Ra≤0.2nm (5μm*5μm)
Hanganga
Kiato paipa moroiti	≤1 ea/cm2	≤5 ea/cm2	≤10 ea/cm2
Nga poke whakarewa	≤5E10atoms/cm2		NA
BPD	≤1500 ea/cm2	≤3000 ea/cm2	NA
TSD	≤500 ea/cm2	≤1000 ea/cm2	NA
Kounga o mua
Mua	Si
Whakamutu mata	Si-mata CMP
Matūriki	≤60ea/wafer (rahi≥0.3μm)	NA
Nga karawarawa	≤2ea/mm. Roa whakaemi ≤Diameter	Roa whakahiato≤2*Diameter	NA
Te kiri karaka/rua/wauwau/wauwau/kapiti/parahanga	Karekau		NA
Nga kongakonga taha/nuo/whawhati/papa hex	Karekau		NA
Nga waahi polytype	Karekau	Horahanga whakahiato≤20%	Horahanga whakahiato≤30%
Tohu taiaho o mua	Karekau
Kounga Whakamuri
Mutunga tuara	C-kanohi CMP
Nga karawarawa	≤5ea/mm, Roa whakahiato≤2* Diameter	NA
He koha ki muri (nga maramara tapa)	Karekau
Te taratara o muri	Ra≤0.2nm (5μm*5μm)
Te tohu taiaho tuara	1 mm (mai i te taha o runga)
Tapa
Tapa	Chamfer
Te takai
Te takai	Ka whakakiia te putea o roto ki te hauota, ka whakakorehia te putea o waho. Ripene angiangi maha, kua reri epi.
*Tuhipoka: "NA" te tikanga kaore he tono Ko nga taonga kaore i whakahuahia ka pa ki te SEMI-STD.