Silicon carbide (SiC) rauemi karaihe kotahi he nui te whanui aputa ropu (~ Si 3 wa), te kawe waiariki tiketike (~ Si 3.3 wa GaAs 10 wa ranei), tiketike irahiko waiwai auau hekenga (~ Si 2.5 wa), hiko pakaru tiketike mara (~Si 10 wa ranei GaAs 5 wa) me etahi atu ahuatanga tino pai.
Ko nga reanga tuatoru o nga rauemi semiconductor ko te nuinga ko te SiC, GaN, taimana, me etahi atu, na te mea he nui ake te whanui aputa roopu (Eg) i te rite ranei ki te 2.3 volts electron (eV), e mohiotia ana ano he rauemi semiconductor aputa roopu whanui. Ka whakatauritea ki nga rauemi semiconductor reanga tuatahi me te tuarua, ko nga rauemi semiconductor reanga tuatoru he painga o te kawe werawera teitei, te waahi hiko pakaru teitei, te tere o te heke o te irahiko kukū me te kaha honohono teitei, ka taea te whakatutuki i nga whakaritenga hou o te hangarau hiko hou mo te teitei. te pāmahana, te kaha nui, te pehanga teitei, te auau teitei me te aukati iraruraru me etahi atu tikanga kino. He nui nga tumanakohanga tono i roto i nga mara o te arai o te motu, te rererangi, te aerospace, te torotoro hinu, te rokiroki whatu, me etahi atu, ka taea te whakaiti i te ngaronga o te kaha ki te neke atu i te 50% i roto i te maha o nga umanga rautaki penei i te whakawhitiwhiti whanui, te hiko o te ra, te hanga motuka, rama semiconductor, me te matiti atamai, a ka taea te whakaiti i te rōrahi taputapu neke atu i te 75%, he mea tino nui mo te whakawhanaketanga o te aoiao me te hangarau tangata.
Ka taea e te kaha Semicera te whakarato i nga kaihoko ki te Conductive (Conductive), Semi-insulating (Semi-insulating), HPSI (High Purity semi-insulating) silicon carbide substrate; I tua atu, ka taea e matou te whakarato i nga kaihoko ki nga pepa epitaxial silicon carbide homogeneous me te heterogeneous; Ka taea hoki e matou te whakarite i te pepa epitaxial kia rite ki nga hiahia motuhake o nga kaihoko, a kaore he rahinga ota iti.
| Nga taonga | Whakaputa | Rangahau | Porekau |
| Tawhā Kiriata | |||
| Polytype | 4H | ||
| Hapa takotoranga mata | <11-20 >4±0.15° | ||
| Tawhā Hiko | |||
| Dopant | n-momo Nitrogen | ||
| Te ātete | 0.015-0.025ohm·cm | ||
| Tawhā Hangarau | |||
| Diamita | 150.0±0.2mm | ||
| Mātotoru | 350±25 μm | ||
| Te takotoranga papa tuatahi | [1-100]±5° | ||
| Te roa papatahi tuatahi | 47.5±1.5mm | ||
| Papatahi tuarua | Karekau | ||
| TTV | ≤5 μm | ≤10 μm | ≤15 μm |
| LTV | ≤3 μm(5mm*5mm) | ≤5 μm(5mm*5mm) | ≤10 μm(5mm*5mm) |
| Kopere | -15μm ~ 15μm | -35μm ~ 35μm | -45μm ~ 45μm |
| Warp | ≤35 μm | ≤45 μm | ≤55 μm |
| Mua (Si-mata) taratara (AFM) | Ra≤0.2nm (5μm*5μm) | ||
| Hanganga | |||
| Kiato paipa moroiti | <1 ea/cm2 | <10 ea/cm2 | <15 ea/cm2 |
| Nga poke whakarewa | ≤5E10atoms/cm2 | NA | |
| BPD | ≤1500 ea/cm2 | ≤3000 ea/cm2 | NA |
| TSD | ≤500 ea/cm2 | ≤1000 ea/cm2 | NA |
| Kounga o mua | |||
| Mua | Si | ||
| Whakamutu mata | Si-mata CMP | ||
| Matūriki | ≤60ea/wafer (rahi≥0.3μm) | NA | |
| Nga karawarawa | ≤5ea/mm. Roa whakaemi ≤Diameter | Roa whakahiato≤2*Diameter | NA |
| Te kiri karaka/rua/wauwau/wauwau/kapiti/parahanga | Karekau | NA | |
| Nga kongakonga taha/nuo/whawhati/papa hex | Karekau | ||
| Nga waahi polytype | Karekau | Horahanga whakahiato≤20% | Horahanga whakahiato≤30% |
| Tohu taiaho o mua | Karekau | ||
| Kounga Whakamuri | |||
| Mutunga tuara | C-kanohi CMP | ||
| Nga karawarawa | ≤5ea/mm, Roa whakahiato≤2* Diameter | NA | |
| He koha ki muri (nga maramara tapa) | Karekau | ||
| Te taratara o muri | Ra≤0.2nm (5μm*5μm) | ||
| Te tohu taiaho tuara | 1 mm (mai i te taha o runga) | ||
| Tapa | |||
| Tapa | Chamfer | ||
| Te takai | |||
| Te takai | Epi-reri me te takai korehau Takai rīpene angiangi maha | ||
| *Tuhipoka: "NA" te tikanga karekau he tono Ko nga taonga kaore i whakahuahia ka pa ki te SEMI-STD. | |||
