Whakaahuatanga
He pai rawa atu nga taonga miihini Silicon carbide i te pāmahana rūma, penei i te kaha teitei, te pakeke teitei, te teitei elastic modulus, me era atu, he pai rawa atu te pumau o te pāmahana-nui penei i te kawe waiariki teitei, te iti o te whakareatanga whakareatanga waiariki, me te pai o te pakari me te whatu. mahi tukatuka.
He pai rawa atu mo te whakaputa i nga waahanga karaiti mo nga taputapu ara iahiko whakauru penei i nga miihini lithography, te nuinga ka whakamahia ki te hanga i te kaikawe / susceptor SiC, poti angiangi SiC, kopae ngote, te pereti whakamahana wai, te whakaata ine tika, te kupenga me etahi atu waahanga hanganga uku.
Nga painga
Te ātete pāmahana teitei: te whakamahi noa i te 1800 ℃
Te kaha o te waiariki: he rite ki te papanga kauwhata
Te pakeke: te pakeke tuarua ki te taimana, boron nitride
Te aukati waikura: te waikawa kaha me te kawakore kaore he waikura ki a ia, he pai ake te aukati i te tungsten carbide me te alumina
Te taumaha mama: iti kiato, tata ki te konumohe
Karekau he rerekee: he iti te whakarea o te roha wera
Te ātete o te werawera: ka taea e ia te tu atu i nga huringa pāmahana koi, te aukati i te wiariki, me te kaha o te mahi
Ko te kaikawe carbide silicone penei i te kaikawe etching sic, ICP etching susceptor, e whakamahia nuitia ana i roto i te CVD semiconductor, te pupuhi korehau me etahi atu.
Nga painga
| Taonga | Uara | Tikanga |
| Kiato | 3.21 g/cc | Totohu-maana me te rahi |
| Te wera motuhake | 0.66 J/g °K | Kohiko hikoi laser |
| Te kaha whakaheke | 450 MPa560 MPa | 4 piko piko, RT4 piko piko, 1300° |
| Te pakari o te whati | 2.94 MPa m1/2 | Microindentation |
| Te pakeke | 2800 | Vicker's, 500g te utaina |
| Elastic ModulusYoung's Modulus | 450 GPa430 GPa | 4 pt piko, RT4 pt piko, 1300 °C |
| Te rahi o te witi | 2 – 10 µm | SEM |
Kōtaha Kamupene
Ko WeiTai Energy Technology Co., Ltd. he kaiwhakarato matua o nga karamu semiconductor matatau me te kaihanga anake i Haina ka taea te whakarato i nga wa ano he parapara silicon carbide (ina koa ko te Recrystallized SiC) me te paninga CVD SiC. I tua atu, kei te kaha ano ta matou kamupene ki nga mara karaera penei i te alumina, te nitride konumohe, te zirconia, me te nitride silicon, etc.
Ko o tatou hua matua tae atu ki: kopae etching silicon carbide, tow poti carbide silicon, wafer wafer silicon carbide (Photovoltaic&Semicconductor), ngongo oumu carbide silicon, te hoe carbide cantilever, chucks silicon carbide, silicon carbide beam, me te paninga CVD SiC me te TaC paninga. Ko nga hua e whakamahia ana i roto i te ahumahi semiconductor me te photovoltaic, penei i nga taputapu mo te tipu o te karaihe, te epitaxy, te tarai, te kapi, te paninga me nga oumu diffusion, etc.
Te kawe
