Poti Kauwhata PECVD Isostatic

Isostatic PECVD Graphite Boat Whakaahua Whakaatuhia

Whakaahuatanga Poto:

Ko te poti graphite Isostatic PECVD e whakamahia nuitia ana i roto i nga hononga rereke o te hanga semiconductor, penei i te polysilicon film deposition, oxide film deposition, nitride film deposition, me etahi atu.

Tukuna he imeera ki a matou

Taipitopito Hua

Tohu Hua

SEMICERA isostatic PECVD graphite poti he hua kauwhata tino parakore, kiato teitei i hangaia mo te tautoko angiangi i roto i te tukanga PECVD (whakapai ake i te whakahekenga matū matū whakaheke). Kei te whakamahi a SEMICERA i te hangarau pehi isostatic matatau ki te whakarite he tino pai te aatete ki te pāmahana teitei o te poti kauwhata, te parenga waikura, te whakapumautanga o te ahu me te pai o te kawe waiariki, he mea tino nui te pau i roto i te mahi whakangao semiconductor.

SEMICERA isostatic PECVD graphite poti he nga painga e whai ake nei:

▪ Tino parakore: Ko te papanga kauwhata he tino parakore me te iti o te poke kia kore ai e poke te mata angiangi.

▪ Kiato teitei: Kiato teitei, kaha miihini teitei, ka taea te tu atu i te pāmahana teitei me te taiao korehau teitei.

▪ He pai te ahua o te ahua: He rereke te ahua iti i te pāmahana teitei hei whakarite kia pumau te tukanga.

▪ He pai te kawe i te waiariki: He pai te whakawhiti i te wera kia kore ai e wera te angiangi.

▪ He kaha te aukati i te waikura: Ka kaha ki te atete i te horo i te tini o nga hau me te plasma.

Tawhā mahi	haurua	SGL R6510	Tawhā mahi
Kiato rahi (g/cm3)	1.91	1.83	1.85
Te kaha piko (MPa)	63	60	49
Kaha kōpeke (MPa)	135	130	103
Maamaa Takutai (HS)	70	64	60
Te whakarea o te roha waiariki（10-6/K）	85	105	130
Te whakarea o te roha waiariki（10-6/K）	5.85	4.2	5.0
Te ātete (μΩm)	11-13	13	10

Nga painga o te kowhiri i a maatau:
▪ Kōwhiringa rauemi: Ka whakamahia nga rauemi graphite tino parakore hei whakarite i te kounga o te hua.
▪ Hangarau Tukatuka: Ka whakamahia te pehi Isostatic hei whakarite i te kiato hua me te riterite.
▪ Whakaritenga Rahi: Ka taea te whakarite i nga poti graphite he rereke te rahi me te ahua kia rite ki nga hiahia o nga kaihoko.
▪ Te maimoatanga o te mata: He maha nga momo tikanga maimoatanga mata e whakaratohia ana, penei i te paninga silicon carbide, boron nitride, me etahi atu, hei whakatutuki i nga whakaritenga tukanga rereke.