Semicerawhakataki teRipene Semiconductor, he taputapu nui mo te whakahaere haumaru me te pai o nga wafers puta noa i te mahi hangahanga semiconductor. He mea hanga ki te tino tika, ma tenei rīpene e whakarite kia noho haumaru, kia haria hoki o wafers, kia mau tonu to ratou tapatahi i ia wahanga.
Te Parenga Nui me te MaamaaKo teRipene Semiconductormai i Semicera ka hangaia hei whakamarumaru mo o wafers. He mea hanga mai i nga rauemi pakari, aatete ki te poke, ka parea e ia o angiangi mai i te kino me te poke, ka waiho hei whiringa pai mo nga taiao ruma ma. Ko te hoahoa o te rīpene e whakaiti ana i te whakatipu matūriki me te whakarite kia noho tonu nga angiangi kia kore e pa, kia mau i te wa e whakahaere ana me te kawe.
Hoahoa Whakarei ake mo te Mahinga PaiKo SemiceraRipene SemiconductorKei te whakaatu i te hoahoa tino hangai e whakarato ana i te tirohanga angiangi tika, ka whakaiti i te tupono o te hee me te kino o te miihini. He tino mokowhiti nga mokowhiti o te rīpene ki te pupuri mau i ia angiangi, hei aukati i nga nekehanga ka puta he karawarawa me etahi atu ngoikoretanga ranei.
Te Maama me te HototahiKo teRipene Semiconductorhe maha, he hototahi ki nga momo angiangi, e pai ana mo nga waahanga rereke o te hanga semiconductor. Ahakoa kei te mahi koe me nga taha angiangi paerewa, ritenga angiangi ranei, ka uru tenei rīpene ki o hiahia, he ngawari ki o mahi whakangao.
Te Whakamaamaa me te MaamaaI hoahoatia me te whakaaro o te kaiwhakamahi, teRipene Semicera Semiconductorhe maamaa me te ngawari ki te hapai, ka taea te tere me te pai o te uta me te tango. Ko tenei hoahoa ergonomic e kore e whakaora noa i te waa engari ka whakaitihia te tupono o te hapa a te tangata, me te whakarite kia pai nga mahi i roto i to whare.
Te whakatutuki i nga Paerewa AhumahiKa whakarite a Semicera ko teRipene Semiconductorka tutuki nga paerewa ahumahi teitei mo te kounga me te pono. Ko ia rīpene he whakamatautau kaha ki te whakapumau i te mahi i nga wa katoa i raro i nga tikanga o te hanga semiconductor. Ko tenei whakapumautanga ki te kounga ka whakarite kia tiakina tonu o wafers, kia mau tonu nga paerewa teitei e hiahiatia ana i roto i te umanga.
| Nga taonga | Whakaputa | Rangahau | Porekau |
| Tawhā Kiriata | |||
| Polytype | 4H | ||
| Hapa takotoranga mata | <11-20 >4±0.15° | ||
| Tawhā Hiko | |||
| Dopant | n-momo Nitrogen | ||
| Te ātete | 0.015-0.025ohm·cm | ||
| Tawhā Hangarau | |||
| Diamita | 150.0±0.2mm | ||
| Mātotoru | 350±25 μm | ||
| Te takotoranga papa tuatahi | [1-100]±5° | ||
| Te roa papatahi tuatahi | 47.5±1.5mm | ||
| Papatahi tuarua | Karekau | ||
| TTV | ≤5 μm | ≤10 μm | ≤15 μm |
| LTV | ≤3 μm(5mm*5mm) | ≤5 μm(5mm*5mm) | ≤10 μm(5mm*5mm) |
| Kopere | -15μm ~ 15μm | -35μm ~ 35μm | -45μm ~ 45μm |
| Warp | ≤35 μm | ≤45 μm | ≤55 μm |
| Mua (Si-mata) taratara (AFM) | Ra≤0.2nm (5μm*5μm) | ||
| Hanganga | |||
| Kiato paipa moroiti | <1 ea/cm2 | <10 ea/cm2 | <15 ea/cm2 |
| Nga poke whakarewa | ≤5E10atoms/cm2 | NA | |
| BPD | ≤1500 ea/cm2 | ≤3000 ea/cm2 | NA |
| TSD | ≤500 ea/cm2 | ≤1000 ea/cm2 | NA |
| Kounga o mua | |||
| Mua | Si | ||
| Whakamutu mata | Si-mata CMP | ||
| Matūriki | ≤60ea/wafer (rahi≥0.3μm) | NA | |
| Nga karawarawa | ≤5ea/mm. Roa whakaemi ≤Diameter | Roa whakahiato≤2*Diameter | NA |
| Te kiri karaka/rua/wauwau/wauwau/kapiti/parahanga | Karekau | NA | |
| Nga kongakonga taha/nuo/whawhati/papa hex | Karekau | ||
| Nga waahi polytype | Karekau | Horahanga whakahiato≤20% | Horahanga whakahiato≤30% |
| Tohu taiaho o mua | Karekau | ||
| Kounga Whakamuri | |||
| Mutunga tuara | C-kanohi CMP | ||
| Nga karawarawa | ≤5ea/mm, Roa whakahiato≤2* Diameter | NA | |
| He koha ki muri (nga maramara tapa) | Karekau | ||
| Te taratara o muri | Ra≤0.2nm (5μm*5μm) | ||
| Te tohu taiaho tuara | 1 mm (mai i te taha o runga) | ||
| Tapa | |||
| Tapa | Chamfer | ||
| Te takai | |||
| Te takai | Epi-reri me te takai korehau Takai rīpene angiangi maha | ||
| *Tuhipoka: "NA" te tikanga karekau he tono Ko nga taonga kaore i whakahuahia ka pa ki te SEMI-STD. | |||
