SiC Epitaxy

Whakaahuatanga Poto:

Ka tukuna e Semicera he kiriata kikokore (silicon carbide) SiC epitaxy i runga i nga taputapu mo te whanaketanga o nga taputapu carbide silicon. Kei te kaha a Weitai ki te whakarato hua kounga me nga utu whakataetae, a kei te tumanako matou ki te noho hei hoa mo te wa roa ki Haina.

 

Taipitopito Hua

Tohu Hua

SiC epitaxy (2)(1)

Whakaahuatanga Hua

4h-n 4inihi 6inihi dia100mm sic kakano angiangi 1mm te matotoru mo te tipu ingot

Rahi ritenga/2inihi/3inihi/4inihi/6inihi 6H-N/4H-SEMI/ 4H-N SIC ingots/Te parakore teitei 4H-N 4inihi 6inihi te 150mm silicon carbide karaihe kotahi (sic) substrates wafersS/ Whakaritea rite-tapahia sic wafersProduction 4inihi kōeke 4H-N 1.5mm SIC Wafers mo te karaihe purapura

Mo te Silicon Carbide (SiC)Crystal

Ko te Silicon carbide (SiC), e mohiotia ana ko te carborundum, he hikohiko kei roto te silicon me te waro me te tauira matū SiC. Kei te whakamahia te SiC i roto i nga taputapu hikohiko hikohiko e mahi ana i nga wera teitei, i nga ngaohiko teitei ranei, e rua ranei. Ko te SiC tetahi o nga waahanga nui o te LED, he taputapu rongonui mo te whakatipu i nga taputapu GaN, a ka mahi ano hoki hei whakamahana wera i roto i te teitei- nga rama hiko.

Whakaahuatanga

Taonga

4H-SiC, Kiriata Kotahi

6H-SiC, Kiriata Kotahi

Tawhā Reihana

a=3.076 Å c=10.053 Å

a=3.073 Å c=15.117 Å

Raupapa Tāpae

ABCB

ABCACB

Mohs pakeke

≈9.2

≈9.2

Kiato

3.21 g/cm3

3.21 g/cm3

Therm. Whakarea Roha

4-5×10-6/K

4-5×10-6/K

Taurangi Refraction @750nm

kāo = 2.61
ne = 2.66

kāo = 2.60
ne = 2.65

Dielectric Tonu

c~9.66

c~9.66

Te Waawera (Momo-N, 0.02 ohm.cm)

a~4.2 W/cm·K@298K
c~3.7 W/cm·K@298K

 

Waahanga Waariki

a~4.9 W/cm·K@298K
c~3.9 W/cm·K@298K

a~4.6 W/cm·K@298K
c~3.2 W/cm·K@298K

Roopu-aputa

3.23 eV

3.02 eV

Waahi-Whakararo Mahere Hiko

3-5×106V/cm

3-5×106V/cm

Terenga Paruru Haumaru

2.0×105m/s

2.0×105m/s

Nga angiangi SiC

Te waahi mahi a Semicera Te waahi mahi Semicera 2 Miihini taputapu Te tukatuka CNN, te horoi matū, te paninga CVD Ta tatou ratonga


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