Silicon On Insulator Wafer

Whakaahuatanga Poto:

Ko Semicera's Silicon On Insulator (SOI) Wafer e whakarato ana i te motuhake hiko me te whakahaere waiariki mo nga tono tino mahi. I hangaia hei kawe i te pai o te taputapu me te pono, ko enei wafers te mea tino pai mo te hangarau semiconductor matatau. Kōwhiri Semicera mō ngā rongoā angiangi SOI.

Tukuna he imeera ki a matou

Taipitopito Hua

Tohu Hua

Ko Semicera's Silicon On Insulator (SOI) Wafer kei mua i te mahi hou semiconductor, e tuku ana i te whakawehe hiko me te mahi waiariki pai ake. Ko te hanganga SOI, he paparanga hiako angiangi i runga i te tïpako whakaraerae, he tino painga mo nga taputapu hiko tino mahi.

I hangaia a tatou angiangi SOI ki te whakaiti i te kaha parapara me te rerenga rerenga, he mea nui mo te whakawhanake iahiko whakauru-tere me te iti-hiko. Ko tenei hangarau matatau ka whakarite kia pai ake te mahi o nga taputapu, me te pai ake o te tere me te whakaiti i te kohi hiko, he mea nui mo te hikohiko hou.

Ko nga mahi whakangao matatau e mahia ana e Semicera e whakamana ana i te hanga o nga angiangi SOI me te tino rite me te riterite. He mea nui tenei kounga mo nga tono i roto i te waea, te miihini, me te hikohiko kaihoko, e hiahiatia ana nga waahanga pono me te tino mahi.

I tua atu i o raatau painga hiko, ka tukuna e te Semicera's SOI wafers te whakamaarama waiariki pai ake, te whakarei ake i te tohanga wera me te pumau i roto i nga taputapu teitei me te hiko teitei. He mea tino nui tenei ahuatanga i roto i nga tono e uru ana ki te whakaputa wera nui me te hiahia ki te whakahaere waiariki whai hua.

Ma te kowhiri i a Semicera's Silicon On Insulator Wafer, ka haumi koe ki tetahi hua e tautoko ana i te ahu whakamua o nga hangarau hou. Ko ta matou piripono ki te kounga me te auahatanga ka whakarite kia tutuki a matou angiangi SOI ki nga tono uaua o te umanga semiconductor o enei ra, e whakarato ana i te turanga mo nga taputapu hiko o muri mai.

Nga taonga	Whakaputa	Rangahau	Porekau
Tawhā Kiriata
Polytype	4H
Hapa takotoranga mata	<11-20 >4±0.15°
Tawhā Hiko
Dopant	n-momo Nitrogen
Te ātete	0.015-0.025ohm·cm
Tawhā Hangarau
Diamita	150.0±0.2mm
Mātotoru	350±25 μm
Te takotoranga papa tuatahi	[1-100]±5°
Te roa papatahi tuatahi	47.5±1.5mm
Papatahi tuarua	Karekau
TTV	≤5 μm	≤10 μm	≤15 μm
LTV	≤3 μm(5mm*5mm)	≤5 μm(5mm*5mm)	≤10 μm(5mm*5mm)
Kopere	-15μm ~ 15μm	-35μm ~ 35μm	-45μm ~ 45μm
Warp	≤35 μm	≤45 μm	≤55 μm
Mua (Si-mata) taratara (AFM)	Ra≤0.2nm (5μm*5μm)
Hanganga
Kiato paipa moroiti	<1 ea/cm2	<10 ea/cm2	<15 ea/cm2
Nga poke whakarewa	≤5E10atoms/cm2		NA
BPD	≤1500 ea/cm2	≤3000 ea/cm2	NA
TSD	≤500 ea/cm2	≤1000 ea/cm2	NA
Kounga o mua
Mua	Si
Whakaoti mata	Si-mata CMP
Matūriki	≤60ea/wafer (rahi≥0.3μm)	NA
Nga karawarawa	≤5ea/mm. Roa whakaemi ≤Diameter	Roa whakahiato≤2*Diameter	NA
Te kiri karaka/rua/wauwau/wauwau/kapiti/parahanga	Karekau		NA
Nga kongakonga taha/nuo/whawhati/papa hex	Karekau
Nga waahi polytype	Karekau	Horahanga whakahiato≤20%	Horahanga whakahiato≤30%
Tohu taiaho o mua	Karekau
Kounga Whakamuri
Mutunga tuara	C-kanohi CMP
Nga karawarawa	≤5ea/mm, Roa whakahiato≤2* Diameter	NA
He koha ki muri (nga maramara tapa)	Karekau
Te taratara o muri	Ra≤0.2nm (5μm*5μm)
Te tohu taiaho tuara	1 mm (mai i te taha o runga)
Tapa
Tapa	Chamfer
Te takai
Te takai	Epi-reri me te takai korehau Takai rīpene angiangi maha
*Tuhipoka: "NA" te tikanga kaore he tono Ko nga taonga kaore i whakahuahia ka pa ki te SEMI-STD.