Ko Semicera e whakaatu ana i te umanga-arahiKaikawe Wafer, i hangaia hei whakarato i te whakamarumaru pai ake me te kawe ngawari o nga wafers semiconductor ngawari puta noa i nga waahanga o te mahi whakangao. To tatouKaikawe Waferhe mea tino hangaia hei whakatutuki i nga hiahia o te hanga semiconductor hou, kia mau tonu te pono me te kounga o o wafers i nga wa katoa.
Āhuatanga matua:
• Hanga Rawa Rawa:He mea hanga mai i nga rawa-kounga teitei, aa-atete ki te paru e whakapumau ana i te mauroa me te roa o te oranga, e pai ana mo nga taiao ruma ma.
•Hoahoa Tika:E whakaatu ana i te tiaroaro tika mo te mokamoka me nga tikanga pupuri haumaru hei aukati i te paheketanga o te angiangi me te kino i te wa e whakahaere ana me te kawe.
•Hototahi maha:Ka uru ki te whānuitanga o nga rahi angiangi me te matotoru, e waatea ana mo nga momo tono semiconductor.
•Te Whakawhanake Ergonomic:Ko te hoahoa maamaa me te hoahoa-kaiwhakamahi ka ngawari te uta me te tango, te whakarei ake i te pai o te whakahaere me te whakaiti i te waa whakahaere.
•Kōwhiringa Whakaritea:Ka tuku whakaritenga ki te whakatutuki i nga whakaritenga motuhake, tae atu ki te kowhiringa rawa, te whakarereketanga o te rahi, me te tapanga mo te whakaurunga rerengamahi papai.
Whakanuia to tukanga whakangao semiconductor me Semicera'sKaikawe Wafer, te otinga tino pai mo te tiaki i o angiangi ki te poke me te kino miihini. Whakawhirinaki ki ta matou piripono ki te kounga me te auahatanga ki te kawe i nga hua kaore e tutuki noa engari ka nui ake i nga paerewa ahumahi, kia pai ai te rere o o mahi.
| Nga taonga | Whakaputa | Rangahau | Porekau |
| Tawhā Kiriata | |||
| Polytype | 4H | ||
| Hapa takotoranga mata | <11-20 >4±0.15° | ||
| Tawhā Hiko | |||
| Dopant | n-momo Nitrogen | ||
| Te ātete | 0.015-0.025ohm·cm | ||
| Tawhā Hangarau | |||
| Diamita | 150.0±0.2mm | ||
| Mātotoru | 350±25 μm | ||
| Te takotoranga papa tuatahi | [1-100]±5° | ||
| Te roa papatahi tuatahi | 47.5±1.5mm | ||
| Papatahi tuarua | Karekau | ||
| TTV | ≤5 μm | ≤10 μm | ≤15 μm |
| LTV | ≤3 μm(5mm*5mm) | ≤5 μm(5mm*5mm) | ≤10 μm(5mm*5mm) |
| Kopere | -15μm ~ 15μm | -35μm ~ 35μm | -45μm ~ 45μm |
| Warp | ≤35 μm | ≤45 μm | ≤55 μm |
| Mua (Si-mata) taratara (AFM) | Ra≤0.2nm (5μm*5μm) | ||
| Hanganga | |||
| Kiato paipa moroiti | <1 ea/cm2 | <10 ea/cm2 | <15 ea/cm2 |
| Nga poke whakarewa | ≤5E10atoms/cm2 | NA | |
| BPD | ≤1500 ea/cm2 | ≤3000 ea/cm2 | NA |
| TSD | ≤500 ea/cm2 | ≤1000 ea/cm2 | NA |
| Kounga o mua | |||
| Mua | Si | ||
| Whakaoti mata | Si-mata CMP | ||
| Matūriki | ≤60ea/wafer (rahi≥0.3μm) | NA | |
| Nga karawarawa | ≤5ea/mm. Roa whakaemi ≤Diameter | Roa whakahiato≤2*Diameter | NA |
| Te kiri karaka/rua/wauwau/wauwau/kapiti/parahanga | Karekau | NA | |
| Nga kongakonga taha/nuo/whawhati/papa hex | Karekau | ||
| Nga waahi polytype | Karekau | Horahanga whakahiato≤20% | Horahanga whakahiato≤30% |
| Tohu taiaho o mua | Karekau | ||
| Kounga Whakamuri | |||
| Mutunga tuara | C-kanohi CMP | ||
| Nga karawarawa | ≤5ea/mm, Roa whakahiato≤2* Diameter | NA | |
| He koha ki muri (nga maramara tapa) | Karekau | ||
| Te taratara o muri | Ra≤0.2nm (5μm*5μm) | ||
| Te tohu taiaho tuara | 1 mm (mai i te taha o runga) | ||
| Tapa | |||
| Tapa | Chamfer | ||
| Te takai | |||
| Te takai | Epi-reri me te takai korehau Takai rīpene angiangi maha | ||
| *Tuhipoka: "NA" te tikanga kaore he tono Ko nga taonga kaore i whakahuahia ka pa ki te SEMI-STD. | |||
