Ka whakaatu a Semicera i teWafer Ripene Kaikawe, he otinga tino nui mo te whakahaere haumaru me te pai o nga wafers semiconductor. I hangaia tenei kaikawe ki te whakatutuki i nga whakaritenga kaha o te ahumahi semiconductor, e whakarite ana i te whakamarumaru me te pono o o wafers puta noa i te mahi whakangao.
Āhuatanga matua:
•Hanganga pakari:Ko teWafer Ripene Kaikawehe mea hanga mai i nga rawa-kounga teitei, mauroa e tu ana i nga uaua o nga taiao semiconductor, e whakarato ana i te whakamarumaru pono ki te poke me te kino o te tinana.
•Tirohanga Tika:I hoahoatia mo te tika o te tirohanga angiangi, ma tenei kaikawe e whakarite kia mau tonu nga angiangi ki te waahi, ka whakaiti i te tupono o te hee, te kino ranei i te wa e kawe ana.
•Mahinga ngawari:I hangaia ergonomically mo te ngawari ki te whakamahi, ka whakangwarihia e te kaikawe te mahi uta me te tango, te whakapai ake i te pai o te rerenga mahi i roto i nga taiao ruma horoi.
•Hototahi:He hototahi ki te whānuitanga o nga rahi me nga momo angiangi, na reira ka whai waahi mo nga momo hiahia whakangao semiconductor.
Ka wheako i te whakamarumaru me te waatea ki a Semicera'sWafer Ripene Kaikawe. I hangaia to maatau kawe ki te whakatutuki i nga paerewa teitei o te whakangao semiconductor, me te whakarite kia noho tonu o wafers mai i te timatanga ki te mutunga. Whakawhirinaki ki a Semicera ki te kawe i te kounga me te pono e hiahiatia ana e koe mo o tukanga tino nui.
| Nga taonga | Whakaputa | Rangahau | Porekau |
| Tawhā Kiriata | |||
| Polytype | 4H | ||
| Hapa takotoranga mata | <11-20 >4±0.15° | ||
| Tawhā Hiko | |||
| Dopant | n-momo Nitrogen | ||
| Te ātete | 0.015-0.025ohm·cm | ||
| Tawhā Hangarau | |||
| Diamita | 150.0±0.2mm | ||
| Mātotoru | 350±25 μm | ||
| Te takotoranga papa tuatahi | [1-100]±5° | ||
| Te roa papatahi tuatahi | 47.5±1.5mm | ||
| Papatahi tuarua | Karekau | ||
| TTV | ≤5 μm | ≤10 μm | ≤15 μm |
| LTV | ≤3 μm(5mm*5mm) | ≤5 μm(5mm*5mm) | ≤10 μm(5mm*5mm) |
| Kopere | -15μm ~ 15μm | -35μm ~ 35μm | -45μm ~ 45μm |
| Warp | ≤35 μm | ≤45 μm | ≤55 μm |
| Mua (Si-mata) taratara (AFM) | Ra≤0.2nm (5μm*5μm) | ||
| Hanganga | |||
| Kiato paipa moroiti | <1 ea/cm2 | <10 ea/cm2 | <15 ea/cm2 |
| Nga poke whakarewa | ≤5E10atoms/cm2 | NA | |
| BPD | ≤1500 ea/cm2 | ≤3000 ea/cm2 | NA |
| TSD | ≤500 ea/cm2 | ≤1000 ea/cm2 | NA |
| Kounga o mua | |||
| Mua | Si | ||
| Whakaoti mata | Si-mata CMP | ||
| Matūriki | ≤60ea/wafer (rahi≥0.3μm) | NA | |
| Nga karawarawa | ≤5ea/mm. Roa whakaemi ≤Diameter | Roa whakahiato≤2*Diameter | NA |
| Te kiri karaka/rua/wauwau/wauwau/kapiti/parahanga | Karekau | NA | |
| Nga kongakonga taha/nuo/whawhati/papa hex | Karekau | ||
| Nga waahi polytype | Karekau | Horahanga whakahiato≤20% | Horahanga whakahiato≤30% |
| Tohu taiaho o mua | Karekau | ||
| Kounga Whakamuri | |||
| Mutunga tuara | C-kanohi CMP | ||
| Nga karawarawa | ≤5ea/mm, Roa whakahiato≤2* Diameter | NA | |
| He koha ki muri (nga maramara tapa) | Karekau | ||
| Te taratara o muri | Ra≤0.2nm (5μm*5μm) | ||
| Te tohu taiaho tuara | 1 mm (mai i te taha o runga) | ||
| Tapa | |||
| Tapa | Chamfer | ||
| Te takai | |||
| Te takai | Epi-reri me te takai korehau Takai rīpene angiangi maha | ||
| *Tuhipoka: "NA" te tikanga kaore he tono Ko nga taonga kaore i whakahuahia ka pa ki te SEMI-STD. | |||
