Ko te paparanga waiariki waiariki o te angiangi angiangi ko te paparanga waikura, te paparanga silica ranei i hanga i runga i te mata kau o te angiangi hiraka i raro i nga ahuatanga o te pāmahana teitei me tetahi kaihoko waikura.Ko te paparanga waiariki waikura o te angiangi silicon i te nuinga o te wa ka tupu i roto i te oumu ngongo whakapae, a ko te nuinga o te 900 ° C ~ 1200 ° C te awhe o te pāmahana tipu, a e rua nga momo tipu o te "hauora maku" me te "whakaora maroke".Ko te paparanga waiariki he paparanga waikura "whakatipu" he teitei ake te riterite me te kaha dielectric teitei ake i te paparanga waikura kua whakatakotoria e te CVD.Ko te paparanga waiariki he paparanga dielectric tino pai hei insulator.I roto i te maha o nga taputapu e hangai ana ki te silicon, he mahi nui te paparanga waiariki hei paparanga aukati doping me te dielectric mata.
Tohutohu: Momo waikura
1. Te waikura maroke
Ka tauhohe te silicon ki te hāora, ka neke te paparanga waikura ki te paparanga papa.Me kawe te waikura maroke i te pāmahana o te 850 ki te 1200 ° C, me te iti o te tipu o te tipu, ka taea te whakamahi mo te tipu o te kuaha MOS.Ki te hiahiatia he paparanga waikura hiraka tino angiangi, he kounga teitei, ka pai ake te waikura maroke ki te waikura maku.
Te kaha hāora maroke: 15nm~300nm(150A ~ 3000A)
2. Hauora mākū
Ka whakamahia e tenei tikanga te ranunga o te hauwai me te hāora tino parakore ki te wera i te ~1000 ° C, na reira ka puta he kohu wai hei hanga i te paparanga waikura.Ahakoa e kore e taea e te hāora mākū te whakaputa i te kahu hāora o te kounga teitei rite te hāora maroke, engari nui ki te whakamahia hei rohe wehe, whakaritea ki te hāora maroke he painga mārama ko te mea he nui ake te tipu.
Te kaha hāora mākū: 50nm~ 15µm (500A ~15µm)
3. Tikanga maroke - tikanga maku - tikanga maroke
I roto i tenei tikanga, ka tukuna te hāora maroke parakore ki roto i te oumu waikura i te wa tuatahi, ka taapirihia te hauwai ki waenganui o te waikura, ka rongoahia te hauwai ki te mutunga ki te haere tonu i te hāora me te hāora maroke parakore ki te hanga i te hanganga o te waiora kia nui ake. te hātepe hāora mākū noa i te āhua o te mamaoa wai.
4. TEOS hāoratanga
| Hangarau Haoraora | Te hāora mākū, te hāora maroke rānei |
| Diamita | 2″ / 3″ / 4″ / 6″ / 8″ / 12″ |
| Te Matotoru Oxide | 100 Å ~ 15µm |
| Te manawanui | +/- 5% |
| Mata | Te Haahi Taha Takitahi(SSO) / Te Waihanga Taha Taurua(DSO) |
| Umu | Umu ngongo whakapae |
| hau | hauwai me te hau hāora |
| Te pāmahana | 900 ℃ ~ 1200 ℃ |
| Taupū Refactive | 1.456 |
